Search for: [Abstrakt = "Optical beam injection methods, such as an optical beam induced current \(OBIC\) one, have several advantages. Such methods enable a comprehensive analysis of photocurrent generated at the microregion of a semiconductor material or a device by focused light beam. In the paper, examples of applications of the OBIC method for \: i\) examination of the silicon p\-i\-n diodes used in a scanning electron microscope \(SEM\) as a detector and ii\) localization of electrically active regions at the interface of the new transparent oxide semiconductor \(TOS\)–semiconductor structure have been outlined."]

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