Search for: [Abstrakt = "Ta\-doped In2O3 transparent conductive oxide \(TCO\) thin films are deposited on glass substrates by radio\-frequency \(RF\) sputtering at room\-temperature. The influence of sputtering power on the structural, morphologic, electrical, and optical properties of the films is investigated by X\-ray diffraction \(XRD\), field emission scanning electron microscopy \(FE\-SEM\), Hall measurement, and optical transmission spectroscopy. The obtained films are polycrystalline with a cubic structure and preferentially oriented in the \(222\) crystallographic direction. The minimum resistivity of 2.8×10–4 Ωcm is obtained from the film deposited at the sputtering power of 170 W. The average optical transmittance of the films is over 90%."]

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