Search for: [Abstrakt = "The authors demonstrate a detection system of EUV radiation pulses. The system provides energy measurements with uncertainty of 7.3% in the range of wavelengths 13.5 ± 0.5 nm \(FWHM = 7.3%\). The calibration of the system was taken using the E\-Mon commercial meter and a laser\-plasma source. The procedures made it possible to determine a calibration factor for the laser\-plasma source with helium\-xenon gas puff target. The factor is exploited for the purpose of standardizing measurements of EUV radiation with FWHM = 2%. A substantial improvement in the system responsivity is demonstrated."]

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