@misc{Luo_Ningning_Three-dimensional_2012, author={Luo, Ningning and Gao, Yiqing and Zhimin, Zhang and Mengchao, Xiao and Huaming, Wu}, identifier={DOI: 10.5277/oa120417}, year={2012}, rights={Wszystkie prawa zastrzeżone (Copyright)}, publisher={Oficyna Wydawnicza Politechniki Wrocławskiej}, description={Optica Applicata, Vol. 42, 2012, Nr 4, s. 845-852}, language={eng}, title={Three-dimensional microstructures of photoresist formed by gradual gray-scale lithography approach}, type={artykuł}, keywords={optyka, gradual gray-scale lithography, DMD pixel error, axicon array, microlens array}, }