@misc{Riahi_Mohammadreza_Fabrication_2011,
 author={Riahi, Mohammadreza and Latifi, Hamid},
 contributor={Gaj, Miron. Redakcja and Urbańczyk, Wacław. Redakcja},
 year={2011},
 rights={Wszystkie prawa zastrzeżone (Copyright)},
 publisher={Oficyna Wydawnicza Politechniki Wrocławskiej},
 description={Optica Applicata, Vol. 41, 2011, Nr 3, s. 735-742},
 language={eng},
 abstract={In this article, application of a 2D thermally tunable reflective grating for measuring the beam profile of a CO2 laser is proposed. A 2D grating is first fabricated on a glass substrate by conventional lithography technique. The grooves of the grating are filled with nitrobenzene, the refractive index of which highly depends on temperature. A double side polished silicon wafer is then placed on the grating. If a CO2 laser is incoming from silicon side, a portion of it is transmitted and absorbed in the grating structure. Depending on the beam profile of the CO2 laser, a temperature profile is produced on the grating causing the same profile for efficiency of the grating for a visible light. The changes in the efficiency, cause changes in intensity of dif-fraction orders. By measuring the intensity of the first order of diffraction, the beam profile of the CO2 laser is imaged on a visible CCD camera.},
 title={Fabrication of a 2D thermally tunable reflective grating for measuring a CO2 laser beam profile},
 type={artykuł},
 keywords={optyka, tunable grating, laser beam profiler},
}