Title:

Electron paramagnetic resonance and scanning electron microscopy characterization of diamond films fabricated by HF CVD method

Group publication title:

Optica Applicata

Creator:

Fabisiak, Kazimierz ; Szreiber, Maciej ; Uniszkiewicz, Cezary ; Runka, Tomasz ; Kasprowicz, Dobrosława

Contributor:

Gaj, Miron. Redakcja ; Urbańczyk, Wacław. Redakcja

Subject and Keywords:

optyka ; hot filament chemical vapour deposition (HF CVD) ; diamond ; electron paramagnetic resonance (EPR) ; Raman spectroscopy

Description:

Optica Applicata, Vol. 39, 2009, nr 4, s. 833-837

Abstrakt:

Defects in diamond films, produced by the hot filament chemical vapour deposition (HF CVD) of methanol and hydrogen mixture as function of gas composition, were investigated by electron paramagnetic resonance (EPR), scanning electron microscopy (SEM) and Raman spectroscopy measurements. We found an isotropic g-value (2.003±0.0002) independent of growth conditions. The peak-to-peak of EPR line width changes from 0.3 to 0.6 mT and the spin density increases from 2.3·1017 to 3.2·1018 spin/cm–3 with increasing concentration of methanol vapour. The EPR line in general shows double character and was found to be superposition of two components, a narrower Lorentzian and a broader Gaussian, suggesting the existence of two different types of defects in diamond layer. EPR measurements were supported by SEM observation.

Publisher:

Oficyna Wydawnicza Politechniki Wrocławskiej

Place of publication:

Wrocław

Date:

2009

Resource Type:

artykuł

Source:

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Language:

eng

Relation:

Optica Applicata ; Optica Applicata, Vol. 39, 2009 ; Optica Applicata, Vol. 39, 2009, nr 4 ; Politechnika Wrocławska. Wydział Podstawowych Problemów Techniki

Rights:

Wszystkie prawa zastrzeżone (Copyright)

Access Rights:

Dla wszystkich w zakresie dozwolonego użytku

Location:

Politechnika Wrocławska