Title:

The method of integration of silicon – micromachined sensors and actuators to microreactor made of Foturan® glass

Group publication title:

Optica Applicata

Creator:

Knapkiewicz, Paweł ; Walczak, Rafał ; Dziuban, Jan A.

Contributor:

Gaj, Miron. Redakcja

Subject and Keywords:

optyka ; microreaction technology ; sensors integration ; low temperature anodic bonding ; Foturan® glass and silicon anodic bonding

Description:

Optica Applicata, Vol. 37, 2007, nr 1-2, s. 65-72

Abstrakt:

In this article results of unique low temperature anodic bonding silicon and Foturan® glass are presented. The new method of anodic bonding can be useful in designing and fabrication of intelligent microreactors equipped with microsensors and other microdevices suitable both to control and to steer chemical process. Direct assembling onto microreactors allows to think about integrated microreactors equipped with set of sensors, i.e., pressure sensors and other devices, i.e., valves, flow meters, etc. The demand for integration microreactor with measuring /steering setup, following the technology of low temperature anodic bonding and application of this technique are described.

Publisher:

Oficyna Wydawnicza Politechniki Wrocławskiej

Place of publication:

Wrocław

Date:

2007

Resource Type:

artykuł

Source:

<sygn. PWr A3481II> ; click here to follow the link ; click here to follow the link

Language:

eng

Relation:

Optica Applicata ; Optica Applicata, Vol. 37, 2007 ; Optica Applicata, Vol. 37, 2007, nr1-2 ; Politechnika Wrocławska. Wydział Podstawowych Problemów Techniki

Rights:

Wszystkie prawa zastrzeżone (Copyright)

Access Rights:

Dla wszystkich w zakresie dozwolonego użytku

Location:

Politechnika Wrocławska