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Title: Sinusoidal phase modulating interferometer for real-time surface profile measurement

Creator:

Guotian, He ; Helun, Jiang ; Xingwen, Tan

Contributor:

Gaj, Miron. Redakcja ; Urbańczyk, Wacław. Redakcja

Description:

Optica Applicata, Vol. 38, 2008, nr 2, s. 413-420

Abstrakt:

The optical interferometry for the surface profile measurement is high accuracy, non-contact, and has a wide application in industry and scientific research. In this paper, a sinusoidal phase modulating (SPM) interferometer to realize real-time surface profile measurement is proposed, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 5.2 nm. The experimental results confirm the validity of the SPM interferometer, and the merits of the interferometer is simple structure, high measurement accuracy.

Publisher:

Oficyna Wydawnicza Politechniki Wrocławskiej

Place of publication:

Date:

Resource Type:

Resource Identifier:

oai:dbc.wroc.pl:62881

Source:

<sygn. PWr A3481II> ; click here to follow the link ; click here to follow the link

Language:

Relation:

Optica Applicata ; Optica Applicata, Vol. 38, 2008 ; Optica Applicata, Vol. 38, 2008, nr 2 ; Politechnika Wrocławska. Wydział Podstawowych Problemów Techniki

Rights:

Wszystkie prawa zastrzeżone (Copyright)

Access Rights:

Dla wszystkich w zakresie dozwolonego użytku

Location:

Politechnika Wrocławska

Group publication title:

Optica Applicata

Subject and keywords:

optyka real-time measurement surface profile SPM interferometer

Object collections:

Lower Silesian Digital Library > Participants of the Consortium > 01. Wrocław University of Technology > Journals WUoT > Journals published at Wrocław University of Technology > Optica Applicata

Lower Silesian Digital Library > Resources > 2. Czasopisma > Czasopisma współczesne

Lower Silesian Digital Library > Fields of science > 6. Nauki ścisłe i przyrodnicze

Last modified:

Mar 22, 2019

In our library since:

Mar 22, 2019

Number of object content hits:

5

All available object's versions:

https://dbc.wroc.pl/publication/114247

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Optica Applicata

Edition name	Date
Sinusoidal phase modulating interferometer for real-time surface profile measurement	Mar 22, 2019

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